• DocumentCode
    3016938
  • Title

    Synthesis of tungsten oxide nanowires/porous silicon composite and its sensing properties for NO2

  • Author

    Shuangyun Ma ; Ming Hu ; Mingda Li ; Jiran Liang ; Changqing Li

  • Author_Institution
    Sch. of Electron. & Inf. Eng., Tianjin Univ., Tianjin, China
  • fYear
    2013
  • fDate
    5-8 Aug. 2013
  • Firstpage
    57
  • Lastpage
    60
  • Abstract
    A novel composite structure of WO3 nanowires/porous silicon has been successfully synthesized via a convenient thermal evaporation method without using any catalysts. The diameters and lengths of nanowires are 40-60 nm and 20-30 μm, respectively, and the aspect ratio (length/diameter) of nanowires could be in range of 500-750. The obtained products were investigated by scanning electron microscopy, transmission electron microscopy, and energy dispersive spectroscopy. The response to NO2 of WO3 nanowires/porous silicon composite was investigated. It was found that the composite sensor had a good response to NO2 at 50 °C. The lowest concentration of NO2 detected was 1ppm and the response could be up to 6.17 at NO2 concentration of 6 ppm. The novel composite structure improved sensing properties which are significant for future applications.
  • Keywords
    X-ray chemical analysis; catalysts; chemical sensors; nanocomposites; nanofabrication; nanowires; nitrogen compounds; porous materials; scanning electron microscopy; silicon; transmission electron microscopy; tungsten compounds; NO2; WO3-Si; catalysts; composite sensor; energy dispersive spectroscopy; scanning electron microscopy; sensing properties; temperature 50 degC; thermal evaporation method; transmission electron microscopy; tungsten oxide nanowires-porous silicon composite materials; Gas detectors; Nanowires; Scanning electron microscopy; Silicon; Substrates; Tungsten;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
  • Conference_Location
    Beijing
  • ISSN
    1944-9399
  • Print_ISBN
    978-1-4799-0675-8
  • Type

    conf

  • DOI
    10.1109/NANO.2013.6720924
  • Filename
    6720924