Title :
Fabrication of aperiodic subwavelength nanostructures by Grayscale Interference Lithography (GIL)
Author :
Choi, Hyoung Jin ; Jeong-Gil Kim ; Barbastathis, George
Author_Institution :
Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
We propose a novel and simple method to fabricate aperiodic subwavelength nanostructures by Grayscale Interference Lithography (GIL) with the conventional Lloyd´s mirror interferometer and a movable aperture plate.
Keywords :
interferometers; lithography; mirrors; nanotechnology; GIL; Lloyd´s mirror interferometer; aperiodic subwavelength nanostructures fabrication; grayscale interference lithography; movable aperture plate; Laser beams; Lithography; Photonics; Substrates;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-0675-8
DOI :
10.1109/NANO.2013.6720936
