• DocumentCode
    3017166
  • Title

    Fabrication of aperiodic subwavelength nanostructures by Grayscale Interference Lithography (GIL)

  • Author

    Choi, Hyoung Jin ; Jeong-Gil Kim ; Barbastathis, George

  • Author_Institution
    Massachusetts Inst. of Technol., Cambridge, MA, USA
  • fYear
    2013
  • fDate
    5-8 Aug. 2013
  • Firstpage
    1042
  • Lastpage
    1045
  • Abstract
    We propose a novel and simple method to fabricate aperiodic subwavelength nanostructures by Grayscale Interference Lithography (GIL) with the conventional Lloyd´s mirror interferometer and a movable aperture plate.
  • Keywords
    interferometers; lithography; mirrors; nanotechnology; GIL; Lloyd´s mirror interferometer; aperiodic subwavelength nanostructures fabrication; grayscale interference lithography; movable aperture plate; Laser beams; Lithography; Photonics; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
  • Conference_Location
    Beijing
  • ISSN
    1944-9399
  • Print_ISBN
    978-1-4799-0675-8
  • Type

    conf

  • DOI
    10.1109/NANO.2013.6720936
  • Filename
    6720936
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3017166