Magnetron with metal-hydride cathode as a source of negative ions

Summary form only given, as follows. The specific construction of a planar magnetron allows one to produce a great number of low energy electrons in crossed E/spl times/H fields of cathode-anode space. In such conditions negative ions may be formed due to dissociative attachment of low energy electrons to molecules of such gases as oxygen, hydrogen and some other gases, which forms negative ions of F and Cl. Using a metal-hydride, saturated with hydrogen, as a cathode of the planar magnetron leads to the beam density increasing with effective expenditure of hydrogen. The negative ion beams of oxygen and hydrogen with density of 3-5 mkA/cm/sup 2/ were obtained experimentally. Negative hydrogen ion beam density was increased up to 30%, when magnetron cathode of metal-hydride, saturated with hydrogen, was used.