Title :
Piezoelectrically transduced single-crystal-silicon plate resonators
Author :
Jaakkola, Antti ; Rosenberg, Piia ; Asmala, Samuli ; Nurmela, Arto ; Pensala, Tuomas ; Riekkinen, Tommi ; Dekker, James ; Mattila, Tomi ; Alastalo, Ari ; Holmgren, Olli ; Kokkonen, Kimmo
Author_Institution :
VTT Tech. Res. Centre of Finland, Helsinki
Abstract :
We report on the design, fabrication and characterization of piezoelectrically actuated single-crystal silicon plate resonators vibrating mainly in their bulk acoustic wave modes. Two resonator types are presented: one operates in the square extensional mode at 26 MHz with Q~18000 and motional resistance Rm~0.240 kOmega, while the other resonator features a resonance at 22 MHz with Q~51000 and Rm~1.5 kOmega. The resonators are characterized electrically and by scanning laser interferometry. Measured vibration fields are compared to simulated eigenmodes.
Keywords :
acoustic resonators; bulk acoustic wave devices; crystal resonators; eigenvalues and eigenfunctions; elemental semiconductors; piezoelectric actuators; piezoelectric transducers; silicon; vibrations; Si; bulk acoustic wave modes; eigenmodes; electrical characteristics; frequency 22 MHz; frequency 26 MHz; piezoelectrically actuated resonator; piezoelectrically transduced resonator; scanning laser interferometry; single-crystal-silicon plate resonator; square extensional mode; vibration field measurement; Acoustic waves; Electric resistance; Electrical resistance measurement; Frequency; Laser modes; Micromechanical devices; Resonance; Shape measurement; Silicon; Vibration measurement;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0171
