• DocumentCode
    3018092
  • Title

    Acoustic waves in LiNbO3/SiO2/water/silicon rubber structures

  • Author

    Darinskii, A.N. ; Weihnacht, M. ; Schmidt, H.

  • Author_Institution
    Inst. of Crystallogr., Russian Acad. Sci., Moscow
  • fYear
    2008
  • fDate
    2-5 Nov. 2008
  • Firstpage
    1401
  • Lastpage
    1404
  • Abstract
    This paper studies acoustic waves in a water layer enclosed between the YZ-LiNbO3 substrate coated with a thin SiO2 layer and the half-infinite domain occupied by silicone rubber. The plane wave spectrum is computed. Numerical estimations are made of the COM-parameters describing a periodic grating deposited on the LiNbO3 substrate under the SiO2 layer. The dependence of the COM-parameters is investigated on characteristics and conditions specifying the structure.
  • Keywords
    acoustic streaming; acoustic wave propagation; lithium compounds; silicone rubber; surface acoustic waves; COM-parameters; LiNbO3-H2O-SiO2; SAW propagation; acoustic streaming; half-infinite domain; numerical estimation; periodic grating deposition; plane wave spectrum; silicone rubber; surface acoustic wave propagation; water layer; Acoustic waves; Crystallography; Electrodes; Gratings; Microfluidics; Permittivity; Pumps; Rubber; Silicon; Surface acoustic waves; anisotropy; microfluidics; piezoelectricuty; surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2008. IUS 2008. IEEE
  • Conference_Location
    Beijing
  • Print_ISBN
    978-1-4244-2428-3
  • Electronic_ISBN
    978-1-4244-2480-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2008.0340
  • Filename
    4803267
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3018092