The MSM diamond device for direct and indirect X-ray detection

Author

Cheirsirikul, S. ; Jesen, S. ; Hruanun, C.

Author_Institution

Fac. of Eng., King Mongkut´s Inst. of Technol. Ladkrabang, Bangkok, Thailand

fYear

2015

fDate

7-11 April 2015

Firstpage

372

Lastpage

374

Abstract

Development synthesizing diamond film on silicon substrate was processed by Hot Filament Chemical Vapor Deposition (HFCVD). The gas processes using of H₂ and CH₄ to produce intrinsic diamond and MSM device constructed on the diaphragm of diamond film. Schottky junctions on the top and the lower diaphragm were produced by aluminum metal. After that, the result of detecting a direct and indirect X-ray of MSM diamond was satisfactory because it could respond along with increasing of X-ray intensity. The X-ray expose time of indirect expose by BaF₂ scintillator faster more than direct expose.

Keywords

Schottky effect; X-ray detection; chemical vapour deposition; diamond; diaphragms; scintillation; scintillation counters; thin film sensors; C; HFCVD; MSM diamond film device; Schottky junction; X-ray detection; X-ray intensity; aluminum metal; diaphragm; gas processing; hot filament chemical vapor deposition; scintillator; silicon substrate; Crystals; Diamonds; Films; Photoconductivity; Photonics; Silicon; X-ray detection; Diamond-film fabrication; Indirect X-ray detection; MSM diamond; direct X-ray detection;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on

Conference_Location

Xi´an

Type

conf

DOI

10.1109/NEMS.2015.7147446

Filename

7147446