Title :
Design of Computer Experiments: A powerful tool for the numerical design of BAW filters
Author :
Reinhardt, A. ; De Crécy, F. ; Aïd, M. ; Iborra, E. ; Giraud, S. ; Bila, S.
Author_Institution :
CEA, Grenoble
Abstract :
We apply Design of Computer Experiments methods to the simulation of piezoelectric stacks and the design of BAW resonators and filters. Through the example of DCS filters with two different technologies (Iridium and Molybdenum electrodes), we show that the definition and the exploitation of a metamodel can accurately replace acoustic simulations and allows therefore a much faster material stack design.
Keywords :
acoustic filters; acoustic resonators; bulk acoustic wave devices; design of experiments; iridium; molybdenum; piezoelectric materials; BAW filter; BAW resonator; acoustic simulation; bulk acoustic wave filters; design-of-computer experiments; iridium electrode; metamodel; molybdenum electrode; piezoelectric stacks; Computational modeling; Digital filters; Distributed control; Electrodes; Polynomials; Process design; Resonance; Resonant frequency; Resonator filters; US Department of Energy; DCS filter; Design of Computer Experiments; Resonator design;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0541
