DocumentCode
3018879
Title
Design of Computer Experiments: A powerful tool for the numerical design of BAW filters
Author
Reinhardt, A. ; De Crécy, F. ; Aïd, M. ; Iborra, E. ; Giraud, S. ; Bila, S.
Author_Institution
CEA, Grenoble
fYear
2008
fDate
2-5 Nov. 2008
Firstpage
2185
Lastpage
2188
Abstract
We apply Design of Computer Experiments methods to the simulation of piezoelectric stacks and the design of BAW resonators and filters. Through the example of DCS filters with two different technologies (Iridium and Molybdenum electrodes), we show that the definition and the exploitation of a metamodel can accurately replace acoustic simulations and allows therefore a much faster material stack design.
Keywords
acoustic filters; acoustic resonators; bulk acoustic wave devices; design of experiments; iridium; molybdenum; piezoelectric materials; BAW filter; BAW resonator; acoustic simulation; bulk acoustic wave filters; design-of-computer experiments; iridium electrode; metamodel; molybdenum electrode; piezoelectric stacks; Computational modeling; Digital filters; Distributed control; Electrodes; Polynomials; Process design; Resonance; Resonant frequency; Resonator filters; US Department of Energy; DCS filter; Design of Computer Experiments; Resonator design;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location
Beijing
Print_ISBN
978-1-4244-2428-3
Electronic_ISBN
978-1-4244-2480-1
Type
conf
DOI
10.1109/ULTSYM.2008.0541
Filename
4803299
Link To Document