Title :
An eigenmode superposition model for lateral acoustic coupling between thin film BAW resonators
Author :
Pensala, Tuomas ; Meltaus, Johanna ; Ylilammi, Markku
Author_Institution :
VTT Tech. Res. Centre of Finland, Espoo
Abstract :
A simple model is developed for calculating lateral acoustical coupling between adjacent thin film BAW resonators forming an electrical N-port. The model is based on plate wave dispersion properties of different regions of the device and solution of lateral eigenmodes and eigenfrequencies. Mechanical and electrical response of the device is calculated as a superposition of eigenmodes according to voltage drive at one electrical port at a time while extracting current induced in the other ports, leading to a full Y-parameter description of the device. Comparison of model prediction with experimental results from adjacent large square resonators and narrow finger-like resonators is performed. Large resonators exhibit comb-shaped oscillating transmission characteristics over wide frequency band, while narrow finger create a single pass-band. Fair qualitative agreement is obtained.
Keywords :
acoustic couplers; acoustic dispersion; acoustic resonators; acoustic wave transmission; bulk acoustic wave devices; eigenvalues and eigenfunctions; thin film devices; Y-parameter description; comb-shaped oscillating transmission characteristics; eigenfrequency; eigenmode superposition model; electrical N-port; electrical response; lateral acoustic coupling; lateral acoustical coupling; mechanical response; plate wave dispersion property; thin film BAW resonator; Fingers; Frequency; Mobile handsets; Predictive models; Process design; Resonator filters; Tellurium; Transistors; Vibrations; Voltage;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0375
