• DocumentCode
    3019814
  • Title

    Multi-functional MEMS/NEMS for nanometrology applications

  • Author

    Ling Hao ; Gallop, J. ; Stewart, Monique ; Lees, K. ; Jie Chen

  • Author_Institution
    Nat. Phys. Lab., Teddington, UK
  • fYear
    2013
  • fDate
    5-8 Aug. 2013
  • Firstpage
    1119
  • Lastpage
    1124
  • Abstract
    As micro- and nano-electromechanical systems (M/NEMS) enter more widely into sensing applications and precision nanometrology it is timely to consider the advantages to be gained from a excitation and readout system which may be tailored for a wide range of applications. In this paper we describe a system that we are developing which allows a combination of excitation and readout methods which impact on many potential applications.
  • Keywords
    microsensors; nanosensors; MEMS resonator; NEMS resonator; excitation methods; multifunctional MEMS; multifunctional NEMS; nanometrology applications; readout methods; Lasers; Measurement by laser beam; Microwave amplifiers; Nanoelectromechanical systems; Optical resonators; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
  • Conference_Location
    Beijing
  • ISSN
    1944-9399
  • Print_ISBN
    978-1-4799-0675-8
  • Type

    conf

  • DOI
    10.1109/NANO.2013.6721047
  • Filename
    6721047
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3019814