The Phase-Locked Interferometric Method for Nanometric Position Control

Author

Suan, Xu ; Yanyan, Huang ; Jian, Sun ; Chassagne, Luc ; Topcu, Suat

Author_Institution

Coll. of Metrol. & Meas. Eng., China Jiliang Univ., Hangzhou, China

fYear

2010

fDate

25-27 June 2010

Firstpage

2392

Lastpage

2395

Abstract

We proposed a nanometric position control method based on a home-made high frequency phase-shifting electronic circuit and a heterodyne interferometer. The displacements with steps of 4.94nm are presented. Repeatability of 0.075nm has been obtained over 1μm displacement range. Such method could be used over milimeter range displacements in a controlled surrounding environment leading to numerous applications in nanometrology.

Keywords

displacement measurement; measurement by laser beam; millimetre wave phase shifters; nanophotonics; optical phase locked loops; optical phase shifters; phase shifting interferometry; position control; heterodyne interferometer; home-made high frequency phase shifting electronic circuit; milimeter range displacement; nanometric position control; nanometrology; phase locked interferometric method; size 0.075 nm; size 4.94 nm; Displacement measurement; Electric variables measurement; Laser beams; Measurement by laser beam; Mirrors; Phase measurement; Phase shifting interferometry; Nanometric position control; interferometer; phase-locked loop;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Control Engineering (ICECE), 2010 International Conference on

Conference_Location

Wuhan

Print_ISBN

978-1-4244-6880-5

Type

conf

DOI

10.1109/iCECE.2010.590

Filename

5631947