DocumentCode :
3020915
Title :
Nanocarbon structures for electronic applications — A critical review
Author :
Duesberg, Georg S.
Author_Institution :
Centre for Research in Adaptive Nanostructures and Nanodevices (CRANN)
fYear :
2011
fDate :
14-16 March 2011
Firstpage :
1
Lastpage :
2
Abstract :
In this paper research on nano-carbon structures for applications beyond CMOS devices is reviewed. Progress in the synthesis, processing and integration of ultra-thin conducting carbon films, graphene and nanotubes for applications such as interconnects, transistors, spintronics and sensing are critically reviewed. This paper present a comprehensive study on large scale CVD grown graphene films and investigate the effects of transfer, structuring and annealing procedures. A comparative study of Raman, AFM, and XPS shows that carefully controlled processing conditions lead to the reproducible manufacture of graphene device arrays.
Keywords :
Raman spectra; X-ray photoelectron spectra; annealing; atomic force microscopy; carbon nanotubes; chemical vapour deposition; elemental semiconductors; graphene; nanofabrication; semiconductor growth; semiconductor thin films; AFM; C; CMOS devices; CVD; Raman spectroscopy; XPS; annealing; carbon nanotubes; electronic applications; graphene films; interconnects; nanocarbon structures; sensors; spintronics; structural property; transistors; ultrathin conducting carbon films; Carbon nanotubes; Fabrication; Films; Performance evaluation; Thermal management;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultimate Integration on Silicon (ULIS), 2011 12th International Conference on
Conference_Location :
Cork
Print_ISBN :
978-1-4577-0090-3
Electronic_ISBN :
978-1-4577-0089-7
Type :
conf
DOI :
10.1109/ULIS.2011.5758010
Filename :
5758010
Link To Document :
بازگشت