Title :
Simulation of wireless passive SAW sensors based on FEM/BEM model
Author :
Fu, Qiuyun ; Luo, Wei ; Wang, Yi ; Wang, Jianling ; Zhou, Dongxiang
Author_Institution :
Dept. of Electron. Sci. & Technol., Huazhong Univ. of Sci. & Technol., Wuhan
Abstract :
Research on the wireless passive surface acoustic wave (SAW) impedance-loaded sensors has received significant attention in recent years. This paper concentrates on the simulation method of these sensors. In our previous work, the coupling-of-modes (COM) model of impedance-loaded SAW sensors was constructed based on the models of SAW IDT. The accuracy of this model depends on the accuracy of their parameters. A numerical combined finite element method and boundary element method (FEM/BEM) model was used to derive COM parameters more accurately in this paper. We used a finite element method to account for the mass loading effect of electrodes and use a Green´s function to model the piezoelectric substrate. Comparison between simulations and measurements on real SAW devices shows good agreement and proofs the effectiveness of this simulation method.
Keywords :
Green´s function methods; acoustic impedance; boundary-elements methods; distributed sensors; finite element analysis; piezoelectric materials; surface acoustic wave sensors; FEM-BEM model; Green´s function; boundary element method; coupling-of-modes model; finite element method; impedance-loaded SAW sensor; mass loading effect; piezoelectric substrate; wireless passive SAW sensor; Acoustic sensors; Acoustic waves; Boundary element methods; Electrodes; Finite element methods; Green´s function methods; Surface acoustic wave devices; Surface acoustic waves; Surface impedance; Wireless sensor networks; FEM/BEM model; SAW sensor; impedance-loaded sensor;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0458
