Extraction of COM parameters on Pt/LGS for high temperature SAW sensor

Author

Aubert, Thierry ; Sarry, Frédéric ; Elmazria, Omar ; Bouvot, Laurent ; Assouar, Badreddine ; Nicolay, Pascal ; Hehn, Michel

Author_Institution

Lab. de Phys. Milieux Ionises et Applic., Nancy Univ., Nancy

fYear

2008

fDate

2-5 Nov. 2008

Firstpage

820

Lastpage

823

Abstract

This work is oriented on the used of effective simulation tools to design high temperature SAW sensor. Physical constants of platinum and LGS and related temperature coefficients recently determined were implemented in FEM/SDA program. Plessky´s parameters of the Pt/LGS structure were extracted for various temperatures and injected in COM software to calculate frequency response of SAW devices. A comparison between experimental and theoretical results showed good agreement up to 250degC and the requirement of a new LGS constants set.

Keywords

finite element analysis; frequency response; gallium compounds; high-temperature techniques; lanthanum compounds; platinum; surface acoustic wave sensors; COM parameter extraction; FEM-SDA program; La₃Ga₅SiO₁₄; Plessky parameter; Pt; frequency response; high temperature SAW sensor; langasite; physical constants; platinum; temperature coefficient; Acoustic sensors; Acoustic waves; Biological materials; Biosensors; Frequency response; Monitoring; Platinum; Surface acoustic wave devices; Surface acoustic waves; Temperature sensors; COM; FEM/SDA; LGS; Pt; experimental results; high temperature; theoretical results;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2008. IUS 2008. IEEE

Conference_Location

Beijing

Print_ISBN

978-1-4244-2428-3

Electronic_ISBN

978-1-4244-2480-1

Type

conf

DOI

10.1109/ULTSYM.2008.0197

Filename

4803419