Title :
SAW-relevant material properties of langasite in the temperature range from 25 to 750 °C: New experimental results
Author :
Shrena, Ismail ; Eisele, David ; Mayer, Elena ; Reindl, Leonhard M. ; Bardong, Jochen ; Schmitt, Martin
Author_Institution :
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg
Abstract :
The aim of this work is to determine the acoustical parameters of langasite up to the highest possible point of temperature. This paper presents measurements of transfer functions for delay lines on langasite at frequencies ranging from 150 MHz to 1 GHz, at temperatures from 25 to 750degC. Two cuts with Euler angles (0deg, 138.5deg, 26.6deg) and (0deg, 30.2deg, 26.6deg) have been studied. The devices were fabricated using langasite as substrate, with two different platinum (Pt) layer heights (45 nm and 75 nm), on a zirconium (Zr) adhesion layer (4 nm). A special signal processing algorithm utilizing cross-correlation was implemented in MATLAB and used for the analysis of measured data. The material parameters relevant for SAW devices, such as phase velocity, propagation loss, and electromechanical coupling coefficient, have been determined as a function of temperature.
Keywords :
acoustic signal processing; high-temperature effects; lanthanum compounds; platinum; surface acoustic wave delay lines; surface acoustic waves; transfer functions; zirconium; La3Ga5SiO14; MATLAB; Pt; SAW devices; Zr; delay lines; frequency 150 MHz to 1 GHz; langasite; surface acoustic waves; temperature 25 degC to 750 degC; transfer function; Acoustic measurements; Adhesives; Delay lines; Frequency measurement; Material properties; Platinum; Signal processing algorithms; Temperature distribution; Transfer functions; Zirconium; SAW; acoustical parameters; component; high temperature; langasite; material properties;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0051
