Screen printed thick film based pMUT arrays

Author

Hedegaard, T. ; Pedersen, T. ; Thomsen, E.V. ; Lou-Moeller, R. ; Hansen, K. ; Zawada, T.

Author_Institution

Dept. of Micro & Nanotechnol., Tech. Univ. of Denmark, Lyngby

fYear

2008

fDate

2-5 Nov. 2008

Firstpage

2126

Lastpage

2129

Abstract

This article reports on the fabrication and characterization of lambda-pitched piezoelectric micromachined ultrasound transducer (pMUT) arrays fabricated using a unique process combining conventional silicon technology and low cost screen printing of thick film PZT. The pMUTs are designed as 8 element membrane based devices dimensioned to operate in bending mode in the 1-10 MHz regime. The devices are characterized using impedance measurements as well as acoustic pulse echo measurements. The characterization showed resonance frequencies for the bending mode around 6-8 MHz.

Keywords

bending; bioMEMS; biomedical transducers; biomedical ultrasonics; echo; electric impedance measurement; micromachining; piezoelectric transducers; thick film devices; ultrasonic transducer arrays; ultrasonic variables measurement; acoustic pulse echo measurement; bending mode; conventional silicon technology; frequency 1 MHz to 10 MHz; impedance measurement; membrane-based device; pMUT array fabrication; piezoelectric micromachined ultrasound transducer; resonance frequency; screen printed thick film; screen printing; Costs; Fabrication; Impedance measurement; Piezoelectric transducers; Printing; Silicon; Thick films; Ultrasonic imaging; Ultrasonic transducer arrays; Ultrasonic transducers; arrayed elements; pMUT; pulse echo; screen printed thick film PZT;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2008. IUS 2008. IEEE

Conference_Location

Beijing

Print_ISBN

978-1-4244-2428-3

Electronic_ISBN

978-1-4244-2480-1

Type

conf

DOI

10.1109/ULTSYM.2008.0526

Filename

4803430