• DocumentCode
    3021966
  • Title

    Development of a new type piezoelectric micromotor

  • Author

    Tani, K. ; Suzuki, M. ; Furuta, K. ; Sakuhara, T. ; Ataka, T.

  • Author_Institution
    Seiko Instrum. Inc., Chiba, Japan
  • fYear
    1998
  • fDate
    25-29 Jan 1998
  • Firstpage
    396
  • Lastpage
    401
  • Abstract
    We designed and fabricated a piezoelectric micromotor which has a new structure suited for miniaturization. The prototype piezoelectric micromotor we fabricated has 2 mm in diameter and 2 mm in height. It consists of a disk-shaped rotor, a cantilever stator and several oscillators with elements made by PZT ceramics. These elements are integrated into the prototype piezoelectric micromotor in a flat configuration. The rotor rotates at 50 to 450 rpm and a drive voltage ranging from 2 to 10 Vpp
  • Keywords
    lead compounds; micromotors; piezoceramics; piezoelectric devices; 2 mm; 2 to 10 V; PZT; PZT ceramics; PbZrO3TiO3; cantilever stator; disk-shaped rotor; drive voltage; flat configuration; miniaturization; oscillators; piezoelectric micromotor; rotational characteristics; Ceramics; Instruments; Micromotors; Prototypes; Research and development; Ring oscillators; Rotors; Stators; Voltage; Voltage-controlled oscillators;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
  • Conference_Location
    Heidelberg
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-4412-X
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1998.659789
  • Filename
    659789
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3021966