Title :
Development of a new type piezoelectric micromotor
Author :
Tani, K. ; Suzuki, M. ; Furuta, K. ; Sakuhara, T. ; Ataka, T.
Author_Institution :
Seiko Instrum. Inc., Chiba, Japan
Abstract :
We designed and fabricated a piezoelectric micromotor which has a new structure suited for miniaturization. The prototype piezoelectric micromotor we fabricated has 2 mm in diameter and 2 mm in height. It consists of a disk-shaped rotor, a cantilever stator and several oscillators with elements made by PZT ceramics. These elements are integrated into the prototype piezoelectric micromotor in a flat configuration. The rotor rotates at 50 to 450 rpm and a drive voltage ranging from 2 to 10 Vpp
Keywords :
lead compounds; micromotors; piezoceramics; piezoelectric devices; 2 mm; 2 to 10 V; PZT; PZT ceramics; PbZrO3TiO3; cantilever stator; disk-shaped rotor; drive voltage; flat configuration; miniaturization; oscillators; piezoelectric micromotor; rotational characteristics; Ceramics; Instruments; Micromotors; Prototypes; Research and development; Ring oscillators; Rotors; Stators; Voltage; Voltage-controlled oscillators;
Conference_Titel :
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location :
Heidelberg
Print_ISBN :
0-7803-4412-X
DOI :
10.1109/MEMSYS.1998.659789
