Title :
Thermally stable oscillator at 2.5 GHz using temperature compensated BAW resonator and its integrated temperature sensor
Author :
Petit, D. ; Cesar, E. ; Bar, P. ; Joblot, S. ; Parat, G. ; Berchaud, O. ; Barbier, D. ; Carpentier, J.F.
Author_Institution :
STMicroelectronics, Crolles
Abstract :
This paper presents a miniaturized 2.5GHz frequency source based on compensated BAW resonator with its integrated temperature molybdenum sensor assembled on the differential Colpitts oscillator. The presence of silicon dioxide layer having a positive temperature coefficient compared to other layers is used to reduce the resonator´s drift. A demonstration oscillator achieves a frequency drift of 40 ppm over a temperature range from -35degC to +85degC. The oscillator´s phase noise of -94dBc/Hz at 2 KHz offset from the carrier is reported.
Keywords :
acoustic resonators; bulk acoustic wave devices; crystal oscillators; molybdenum; phase noise; silicon compounds; temperature sensors; thermal stability; thermoacoustics; Mo; SiO2; differential Colpitts oscillator; frequency 2 kHz; frequency 2.5 GHz; frequency drift; integrated temperature sensor; molybdenum sensor; oscillator phase noise; positive temperature coefficient; quartz oscillator; silicon dioxide layer; temperature -35 degC to 85 degC; temperature compensated BAW resonator; thermally stable oscillator; Acoustic waves; Assembly; Circuit stability; Film bulk acoustic resonators; Frequency; Phase noise; Q factor; Temperature sensors; Thermal sensors; Voltage-controlled oscillators; BAW-SMR; Differential Colpitts oscillator; Quartz; Temperature compensation;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0216
