Miniature one-shot valve

Author

Guérin, L.J. ; Dubochet, O. ; Zéberli, J.F. ; Clot, Ph ; Renaud, Ph

Author_Institution

Inst. for Microsyst., Ecole Polytech. Fed. de Lausanne, Switzerland

fYear

1998

fDate

25-29 Jan 1998

Firstpage

425

Lastpage

428

Abstract

Many microvalves have already been designed and developed. Two types can be found: passive check valves and active valves. However, for some applications, it is needed to open a flow channel only once in order, for example, to trigger a mixing reaction on a micro-bioreactor or to deliver drug sample in smart micropills. In this paper, a new simple one-shot microvalve for single-use applications is described

Keywords

biocontrol; laser ablation; laser beam machining; membranes; microactuators; micromachining; numerical analysis; polymer films; resistors; spark machining; temperature distribution; valves; active valves; drug delivery; drug sample; electrochemical discharge micromachining; excimer laser ablation; flow channel; glass substrate; heating resistor; membrane; micro-bioreactor; microbioreactor; microvalves; miniature one-shot valve; mixing reaction; one-shot microvalve; passive check valves; single-use applications; smart micropills; Biomembranes; Coils; Drugs; Heating; Micromachining; Microvalves; Positron emission tomography; Resistors; Substrates; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on

Conference_Location

Heidelberg

ISSN

1084-6999

Print_ISBN

0-7803-4412-X

Type

conf

DOI

10.1109/MEMSYS.1998.659794

Filename

659794