DocumentCode
3023500
Title
Electrical and optical properties of iodine doped amorphous carbon thin film by Thermal CVD
Author
Dayana, K. ; Fadzilah, A.N. ; Noor, Uzer Mohd ; Rusop, M.
Author_Institution
NANO-Electron. Centre (NET), Univ. Teknol. MARA (UiTM), Shah Alam, Malaysia
fYear
2012
fDate
19-21 Sept. 2012
Firstpage
102
Lastpage
106
Abstract
In this paper, iodine doped amorphous carbon thin films with varying the doping time were prepared onto glass and n-type silicon substrates by Thermal CVD technique. The optical and electrical properties of iodine doped amorphous carbon thin films were characterized by using UV-VIS-NIR spectroscopy and current-voltage (I-V) measurement respectively. The optical band gap of a-C thin films shows a reduction of the optical band gap upon iodine doping. The higher electrical conductivity was found to be at 10 min iodine doping. The structural properties of the films were studied by FESEM and FTIR. FESEM studies shows a uniform distribution of fine small particles on the iodine doped a-C thin films indicating deposition of iodine atoms on the substrates. FTIR measurement shows the effect of iodine on reduction on sp3 bonded carbon in a-C thin film.
Keywords
amorphous semiconductors; carbon; chemical vapour deposition; electrical conductivity; elemental semiconductors; iodine; silicon; thin films; C:I; FESEM; FTIR; Si; UV-VIS-NIR spectroscopy; current-voltage measurement; doping time; electrical conductivity; electrical properties; glass; iodine doped amorphous carbon thin film; n-type silicon substrates; optical band gap; optical properties; structural properties; thermal CVD; time 10 min; Carbon; Conductivity; Doping; Optical films; Photonic band gap; Substrates; amorphous carbon; iodine doping; thermal CVD; thin film;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics (ICSE), 2012 10th IEEE International Conference on
Conference_Location
Kuala Lumpur
Print_ISBN
978-1-4673-2395-6
Electronic_ISBN
978-1-4673-2394-9
Type
conf
DOI
10.1109/SMElec.2012.6417101
Filename
6417101
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