• DocumentCode
    3023500
  • Title

    Electrical and optical properties of iodine doped amorphous carbon thin film by Thermal CVD

  • Author

    Dayana, K. ; Fadzilah, A.N. ; Noor, Uzer Mohd ; Rusop, M.

  • Author_Institution
    NANO-Electron. Centre (NET), Univ. Teknol. MARA (UiTM), Shah Alam, Malaysia
  • fYear
    2012
  • fDate
    19-21 Sept. 2012
  • Firstpage
    102
  • Lastpage
    106
  • Abstract
    In this paper, iodine doped amorphous carbon thin films with varying the doping time were prepared onto glass and n-type silicon substrates by Thermal CVD technique. The optical and electrical properties of iodine doped amorphous carbon thin films were characterized by using UV-VIS-NIR spectroscopy and current-voltage (I-V) measurement respectively. The optical band gap of a-C thin films shows a reduction of the optical band gap upon iodine doping. The higher electrical conductivity was found to be at 10 min iodine doping. The structural properties of the films were studied by FESEM and FTIR. FESEM studies shows a uniform distribution of fine small particles on the iodine doped a-C thin films indicating deposition of iodine atoms on the substrates. FTIR measurement shows the effect of iodine on reduction on sp3 bonded carbon in a-C thin film.
  • Keywords
    amorphous semiconductors; carbon; chemical vapour deposition; electrical conductivity; elemental semiconductors; iodine; silicon; thin films; C:I; FESEM; FTIR; Si; UV-VIS-NIR spectroscopy; current-voltage measurement; doping time; electrical conductivity; electrical properties; glass; iodine doped amorphous carbon thin film; n-type silicon substrates; optical band gap; optical properties; structural properties; thermal CVD; time 10 min; Carbon; Conductivity; Doping; Optical films; Photonic band gap; Substrates; amorphous carbon; iodine doping; thermal CVD; thin film;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Electronics (ICSE), 2012 10th IEEE International Conference on
  • Conference_Location
    Kuala Lumpur
  • Print_ISBN
    978-1-4673-2395-6
  • Electronic_ISBN
    978-1-4673-2394-9
  • Type

    conf

  • DOI
    10.1109/SMElec.2012.6417101
  • Filename
    6417101