DocumentCode
3023753
Title
The effect of surface morphology to photoluminescence spectrum porous silicon
Author
Suhaimi, M. H. Fadzilah ; Zubaidah, M.A. ; Yusop, S.F.M. ; Rusop, M. ; Abdullah, Saad
Author_Institution
NANO-SciTech Centre (NST), Univ. Teknol. MARA (UiTM), Shah Alam, Malaysia
fYear
2012
fDate
19-21 Sept. 2012
Firstpage
149
Lastpage
152
Abstract
The porous silicon nanostructures was prepared by electrochemical etching of p-type silicon wafer. Porous silicon structure has good mechanical robustness, chemical stability, and compatibility with existing silicon technology. Therefore, it also has a wide area of potential applications such as waveguides, 1D photonic crystals, chemical sensors, biological sensor etc. Photoluminescences characteristics of porous silicon depend on their morphology because the size and distribution of pore its self will effect to their exciton energy level. The structure of porous silicon controlled by the parameters used during the experiment which know as experimental factor. These factors such as etching time, current density applied, temperature, doping concentration etc play an important role during the formation of porous. It will effect either to the thickness or porosity of sample. In this work, we select one of that factor to corellate which optical properties of porous silicon. We investigated the surface morphology by using Atomic Force Microscope (AFM) and photoluminescences using Photoluminescences (PL) spectrometer.
Keywords
photoluminescence; porous materials; silicon; 1D photonic crystals; AFM; atomic force microscope; biological sensor; chemical sensors; chemical stability; compatibility; doping concentration; electrochemical etching; etching time; exciton energy level; mechanical robustness; photoluminescence spectrum porous silicon; photoluminescences characteristics; photoluminescences spectrometer; porous silicon nanostructures; silicon technology; surface morphology; waveguides; Etching; Morphology; Rough surfaces; Silicon; Surface morphology; Surface topography;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics (ICSE), 2012 10th IEEE International Conference on
Conference_Location
Kuala Lumpur
Print_ISBN
978-1-4673-2395-6
Electronic_ISBN
978-1-4673-2394-9
Type
conf
DOI
10.1109/SMElec.2012.6417112
Filename
6417112
Link To Document