Title :
Silicon micromachined mass filter for a low power, low cost quadrupole mass spectrometer
Author :
Tullstall, J.J. ; Taylor, S. ; Syms, R.R.A. ; Tate, T. ; Ahmad, M.M.
Author_Institution :
Dept. of Electr. Eng. & Electron., Liverpool Univ., UK
Abstract :
This article considers the design, realisation and initial tests of a quadrupole mass spectrometer with a novel silicon micromachined mass filter. The construction of this device is discussed along with its mounting on a conventional ion source and testing in a vacuum system. Results are presented for the operation of this mass lens including a mass spectrum, and the effect of cage voltage, emission current and pressure on the performance
Keywords :
elemental semiconductors; lenses; mass spectrometer accessories; micromachining; micromechanical devices; semiconductor technology; silicon; Si; Si micromachined mass filter; cage voltage; construction; emission current; ion source; mass lens; mass spectrum; quadrupole mass spectrometer; tests; Costs; Electrodes; Ion sources; Lenses; Mass spectroscopy; Medical diagnostic imaging; Optical fiber filters; Silicon; Substrates; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location :
Heidelberg
Print_ISBN :
0-7803-4412-X
DOI :
10.1109/MEMSYS.1998.659797
