DocumentCode
3023949
Title
Multiple Organic Gas Detection by the Ball Surface Acoustic Wave Sensor
Author
Yamanaka, Kazushi ; Sakamoto, Toshihiro ; Yamamoto, Yutato ; Kobari, Kentaro ; Tsuji, Toshihiro ; Akao, Shingo ; Nakaso, Noritaka
Author_Institution
Tohoku Univ., Sendai, Japan
fYear
2010
fDate
18-25 July 2010
Firstpage
120
Lastpage
123
Abstract
We discovered naturally collimated beam of surface acoustic wave (SAW) on balls and developed ball SAW sensor. It has an unique advantage of ultra-multiple roundtrips more than 100 turns. We achieved for the first time, sensing range of hydrogen from 10 ppm (0.001%) to 100% with a single sensor element, essential for hydrogen stations fuel cell cars. In this study, we describe the development of a MEMS palmtop gas chromatograph (GC) for organic volatile compound (VOC). It realized detection of hazardous gases in a reasonably short time, which will be applied for on-site monitoring of natural gas and fuel cell gases used at cars, home and smart grids.
Keywords
chromatography; gas sensors; microsensors; surface acoustic wave sensors; SAW; ball surface acoustic wave sensor; gas chromatograph; hydrogen stations fuel cell cars; multiple organic gas detection; organic volatile compound; smart grids; ultramultiple roundtrips; Acoustic beams; Films; Force; Gases; Surface acoustic waves; Switches; Valves; Gas chromatograph; VOC; ball SAW sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensor Device Technologies and Applications (SENSORDEVICES), 2010 First International Conference on
Conference_Location
Venice
Print_ISBN
978-1-4244-7474-5
Type
conf
DOI
10.1109/SENSORDEVICES.2010.29
Filename
5632121
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