Title :
Detection of Gold in the Facet of a Failed Semiconductor Laser Diode
Author :
Chaney, J.A. ; Yeoh, T.S. ; Ives, N.A. ; Leung, M.S. ; Feinberg, Z.D. ; Ho, J.G.
Author_Institution :
Aerosp. Corp., El Segundo
Abstract :
The damaged region of a failed semiconductor laser diode was analyzed using FIB nanotomography and 3D TOF-SIMS. Gold, a deep level trap, was found between the antireflective coating and the semiconductor facet.
Keywords :
focused ion beam technology; nanotechnology; optical tomography; semiconductor lasers; 3D TOF-SIMS; FIB nanotomography; gold detection; semiconductor facet; semiconductor laser diode; Chemicals; Coatings; Diode lasers; Face detection; Focusing; Gold; Optical materials; Phase change materials; Semiconductor lasers; Semiconductor materials;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4453593
