Title :
Design and Analysis of Linear Switched Reluctance Motor for High Precision Position Control
Author :
Yuan-Jiang, Liu ; Widdowson, G.P. ; Ho, S.Y. ; Chuen, Gan Wai ; Borsje, P.
Author_Institution :
ASM Assembly Autom. Ltd, Hong Kong
Abstract :
The paper presents the design and analysis of a longitudinal flux linear switched reluctance motor (LSRM) for high precision position control applications. The inductance and force profiles of the LSRM are investigated using an analytical magnetic circuit analysis method and finite element method (FEM). Using FEM, the design of a LSRM is optimized for a semiconductor equipment application with high precision position control. Results from both simulation and experimental testing are also presented.
Keywords :
finite element analysis; linear synchronous motors; magnetic circuits; position control; reluctance motors; analytical magnetic circuit analysis method; finite element method; high precision position control; linear switched reluctance motor; Circuit analysis; Circuit simulation; Circuit testing; Design optimization; Finite element methods; Inductance; Magnetic analysis; Magnetic circuits; Position control; Reluctance motors;
Conference_Titel :
Electric Machines & Drives Conference, 2007. IEMDC '07. IEEE International
Conference_Location :
Antalya
Print_ISBN :
1-4244-0742-7
Electronic_ISBN :
1-4244-0743-5
DOI :
10.1109/IEMDC.2007.383552
