Title :
Annular shutter mirror for a digital video disk pick-up module
Author :
Bu, J.U. ; Hwang, J.D. ; Lee, J.B. ; Kim, G. ; Yang, K.Y. ; Noh, S.
Author_Institution :
Device & Mater. Lab., LG Corp. Inst. of Technol, Seoul, South Korea
Abstract :
This paper describes design and fabrication of micromachined annular shutter mirror (ASM) for use as an adjusting means of the numerical aperture (NA) in a digital video (or versatile) disk (DVD) pick-up module. The ASM was fabricated using conventional 3 masks process based on surface micromachining technology. Driven by an electrostatic force, it is clearly observed that the ASM can control effective beam spot size. The eye pattern of the readout signal of CD proved that the jitter value is 25 ns. We have demonstrated that the ASM is potentially applicable for a compact disk (CD) compatible DVD player that has a growing popularity in the optical data storage market
Keywords :
masks; micromachining; micromechanical devices; mirrors; optical disc storage; optical elements; 25 ns; ASM; DVD player; annular shutter mirror; compact disk; digital video disk; effective beam spot size; electrostatic force; eye pattern; jitter; micromachined annular shutter mirror; optical data storage; pick-up module; readout signal; surface micromachining; three masks process; Apertures; CD recording; DVD; Electrostatics; Fabrication; Force control; Jitter; Micromachining; Mirrors; Size control;
Conference_Titel :
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location :
Heidelberg
Print_ISBN :
0-7803-4412-X
DOI :
10.1109/MEMSYS.1998.659802
