Quasi-2D COM model for diffraction calculation in slanted finger SAW devices

Author

Chilla, E. ; Steiner, B. ; Grünwald, R. ; Osetrov, A.V. ; Hodkin, A.G. ; Jaffer, A.

Author_Institution

Vectron Int., Teltow

fYear

2008

fDate

2-5 Nov. 2008

Firstpage

807

Lastpage

810

Abstract

SAW devices containing slanted finger interdigital transducers (SFITs) show an inhomogeneous acoustic wave field in two directions, i.e. parallel as well as perpendicular with respect to the primary wave propagation direction. Commonly, SFITs are simulated by using one-dimensional coupling-of-modes (COM) theory. However, diffraction as well as refraction may significantly influence the device performance, hence, the calculation of the acoustic wave field becomes essential for accurate device modelling. In this paper we describe a quasi-2D (Q2D) COM approach for SAW diffraction calculation and demonstrate the calculation accuracy for a highly diffractive device produced on 112X-LiTaO₃.

Keywords

acoustic wave diffraction; acoustic wave refraction; interdigital transducers; surface acoustic wave devices; acoustic wave diffraction; acoustic wave refraction; coupling-of-modes theory; inhomogeneous acoustic wave field; primary wave propagation direction; quasi-2D COM model; slanted finger SAW devices; slanted finger interdigital transducers; Acoustic devices; Acoustic diffraction; Acoustic propagation; Acoustic refraction; Acoustic transducers; Acoustic waves; Filters; Fingers; Surface acoustic wave devices; Surface acoustic waves; COM theory; Diffraction; SAW; SFIT devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2008. IUS 2008. IEEE

Conference_Location

Beijing

Print_ISBN

978-1-4244-2428-3

Electronic_ISBN

978-1-4244-2480-1

Type

conf

DOI

10.1109/ULTSYM.2008.0194

Filename

4803556