DocumentCode :
3025334
Title :
A Microfluidic Device with Embedded Capacitive Sensor for Fluid Discrimination and Characterization
Author :
Demori, Marco ; Ferrari, Vittorio ; Poesio, Pietro ; Strazza, Domenico
Author_Institution :
Dipt. di Ing. dell´´Inf., Univ. degli studi di Brescia, Brescia, Italy
fYear :
2010
fDate :
18-25 July 2010
Firstpage :
253
Lastpage :
257
Abstract :
This paper describes the development of a microfluidic device with embedded capacitive sensing that allows the discrimination of fluids on the basis of the dielectric permittivity. The device is fabricated in a hybrid technology, which innovatively combines PDMS (PolyDiMethylSiloxane) soft photolithography and screen printing techniques. A microchannel, realized in a PDMS layer, is placed in the fringe field of a sensing capacitor formed by electrodes screen-printed on a glass substrate. Fluids inside the microchannel affect the capacitance that is measured by a tailored electronic interface system. Experimental results are reported demonstrating the capability of the system to discriminate different fluids and estimate their dielectric permittivity.
Keywords :
capacitance measurement; capacitive sensors; flow measurement; flow sensors; intelligent sensors; microchannel flow; microelectrodes; microfabrication; permittivity; photolithography; polymers; PDMS layer; capacitance measurement; dielectric permittivity; electrode; embedded capacitive sensor; fluid characterization; fluid discrimination; microchannel; microfluidic device; polydimethylsiloxane; screen printing; soft photolithography; tailored electronic interface system; Capacitance; Dielectric measurements; Fluids; Microchannel; Microfluidics; Permittivity; Sensors; PDMS; capacitive sensing; fluid discrimination; microfluidic devices; screen-printing technology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensor Device Technologies and Applications (SENSORDEVICES), 2010 First International Conference on
Conference_Location :
Venice
Print_ISBN :
978-1-4244-7474-5
Type :
conf
DOI :
10.1109/SENSORDEVICES.2010.55
Filename :
5632175
Link To Document :
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