Electromechanically actuated evanescent optical switch and polarization independent attenuator

Microelectromechanical systems (MEMS) seem able to yield low-cost solution for the telecommunications. An exciting application concerns the study of a commutation matrix which needs a large number of 2×2 coupler and presumably attenuators to decrease the cross-talk. This paper reports the design and the realization of a bending waveguide used as an optical attenuator and an optical switch. Both devices are based on spatially induced evanescent field interaction, either between two waveguides or between one waveguide and a lossy medium. First, we present the simulations used for the design with expected performances. Then we report the main points of the technological process based on silicon micromachining. Eventually, optical results are presented with the operation of the device as a polarization insensitive attenuator. This later results definitely establishes the feasibility of an optical coupler actuated mechanically