• DocumentCode
    3025641
  • Title

    Atomic Hydrogen Two-Dimensional Fluorecence Measurements in Chemical Vapor Deposition

  • Author

    Lario, J. ; Walewski, J. ; Hernberg, R.

  • Author_Institution
    Tampere University of Technology
  • fYear
    1998
  • fDate
    18-18 Sept. 1998
  • Firstpage
    85
  • Lastpage
    85
  • Keywords
    Atomic layer deposition; Atomic measurements; Chemical vapor deposition; Delay; Fluorescence; Hydrogen; Plasma chemistry; Plasma measurements; Plasma temperature; Pulse measurements;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Quantum Electronics Conference, 1998. 1998 EQEC. European
  • Conference_Location
    Glasgow, UK
  • Print_ISBN
    0-7803-4231-3
  • Type

    conf

  • DOI
    10.1109/EQEC.1998.714827
  • Filename
    714827
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3025641