Title :
Evaluating Micromachining Capabilities of High Power Diode Pumped Solid State Mode-locked and Q-switched Ultraviolet Laser
Author :
Patel, Rajesh S. ; Bovatsek, Jim
Author_Institution :
Spectra Phys., Mountain View
Abstract :
The micromachining capabilities of two newly developed DPSS mode-locked and q-switched UV lasers have been evaluated by studying ablation of commonly used materials in semiconductor, microelectronics, and solar cell industry.
Keywords :
laser mode locking; micromachining; optical fabrication; semiconductor lasers; solid lasers; high power diode pumped solid state mode-locked laser; microelectronics industry; micromachining capabilities; q-switched ultraviolet laser; semiconductor industry; solar cell industry; Diodes; Laser ablation; Laser excitation; Laser mode locking; Micromachining; Power lasers; Pump lasers; Semiconductor lasers; Solid lasers; Solid state circuits;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4453729
