Title :
Multi-class Fuzzy Comprehensive Evaluation of Semiconductor Wafer Manufacturing Line Real-Time Production
Author :
Chen Qi ; Lu JianFeng ; Zhang Hao
Author_Institution :
CIMS Center, Tongji Univ., Shanghai, China
Abstract :
A multi-class fuzzy comprehensive evaluation (FCE) was introduced to evaluate the performance of semiconductor wafer manufacturing line real-time production in order to improve the quality of scheduling. Basing on the factory physics and semiconductor production characters an index system of quality of semiconductor wafer manufacturing scheduling was established. According to the system, a model of fuzzy evaluation of wafer production was established. Using the fuzzy evaluation, the evaluation model was given as well.
Keywords :
fuzzy set theory; manufacturing systems; production management; quality control; scheduling; semiconductor industry; semiconductor technology; FCE; factory physics; multiclass fuzzy comprehensive evaluation; quality of scheduling; real-time production; semiconductor wafer manufacturing line; Automation; Manufacturing; evaluation model; fuzzy comperhensive evaluation; index system f evaluation; semiconductor wafer manufature;
Conference_Titel :
Digital Manufacturing and Automation (ICDMA), 2013 Fourth International Conference on
Conference_Location :
Qingdao
DOI :
10.1109/ICDMA.2013.193
