Title :
RTP emitter diffusion in an industrial process
Author :
Steeman, Rob A. ; Lefrancois, M.
Author_Institution :
Shell Solar Energy BV, Helmond, Netherlands
Abstract :
Solar cells of 12.5×12.5 cm2 have been fabricated combining industrial processing with rapid thermal emitter diffusion (RTP) in a Vortek arc lamp furnace. Best cells had an efficiency of 11% at a cycle time for the diffusion process of 2.5 minutes, which is less than 1/5th of the conventional diffusion time. Compared to a reference group, in which the emitter was diffused in a classical belt furnace, this was a reduction in efficiency of only 1% absolute. Internal quantum efficiency measurements showed an increased blue response for cells with an RTP emitter, which can be attributed to a reduced emitter thickness. However, the effective diffusion length of the RTP cells was considerably lower than that of the conventional cells
Keywords :
diffusion; elemental semiconductors; rapid thermal processing; silicon; solar cells; RTP emitter diffusion; Si; Vortek arc lamp furnace; blue response; classical belt furnace; cycle time; diffusion process; effective diffusion length; efficiency; industrial process; internal quantum efficiency measurements; rapid thermal emitter diffusion; reduced emitter thickness; solar cells; Argon; Belts; Diffusion processes; Furnaces; Lamps; Photovoltaic cells; Production; Rapid thermal processing; Temperature measurement; Textile industry;
Conference_Titel :
Photovoltaic Specialists Conference, 2000. Conference Record of the Twenty-Eighth IEEE
Conference_Location :
Anchorage, AK
Print_ISBN :
0-7803-5772-8
DOI :
10.1109/PVSC.2000.915815
