Title :
Portable micro liquid dosing system
Author :
Rossberg, R. ; Sandmaier, H. ; Büttgenbach, S.
Author_Institution :
HSG-IMIT, Villingen, Switzerland
Abstract :
We are able to present a portable battery powered micro liquid dosing system, which controls the liquid flow from a pressurized reservoir to a capillary output port. The system consists of a capillary buffer volume controlled by a resonant sensor, a micromachined silicon valve driven by a piezoelectrical actuator, an electronic control system comprising of a sensor processing electronics, a DC/DC-converter for controlling the actuator and a pressurized reservoir. Components have been designed, validated each in characteristics and at last been assembled to a complete dosing system. The typical input pressure is in the range of 0 to 0.4 bar, typical flow rates are up to 0.25 mi/min at 0.22 bar
Keywords :
closed loop systems; elemental semiconductors; microactuators; micromechanical resonators; microsensors; portable instruments; power convertors; silicon; 0 to 0.4 bar; 0.22 bar; DC/DC-converter; Si; Si micromachined valve; capillary buffer volume; capillary output port; electronic control; piezoelectrical actuator; portable micro liquid dosing; pressurized reservoir; resonant sensor; Batteries; Control systems; Fluid flow; Piezoelectric actuators; Pressure control; Reservoirs; Resonance; Sensor phenomena and characterization; Sensor systems; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location :
Heidelberg
Print_ISBN :
0-7803-4412-X
DOI :
10.1109/MEMSYS.1998.659813
