Title :
Accurate modeling of capacitive micromachined ultrasonic transducers in pulse-echo operation
Author :
Balantekin, Mujdat ; Degertekin, F. Levent
Author_Institution :
Woodruff Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA
Abstract :
We present a large-signal model of capacitive micromachined ultrasonic transducers (CMUTs). This model combined with transmit-receive electronics is implemented in an electrical circuit simulator. We investigate optimum biasing scheme to increase output pressure and the amount of nonlinearity generated in transmit. Comparison to experiments shows that the model can be used to estimate the performance of CMUTs in pulse-echo operation.
Keywords :
biomedical transducers; biomedical ultrasonics; blood flow measurement; capacitive sensors; microsensors; ultrasonic transducer arrays; CMUT modeling; capacitive micromachined ultrasonic transducers; electrical circuit simulator; large signal model; nonlinearity generation; optimum biasing scheme; output pressure; pulse echo CMUT operation; transmit-receive electronics; Biomembranes; Circuit simulation; Electrostatics; Impedance; Mechanical engineering; Pulse amplifiers; Switches; Ultrasonic imaging; Ultrasonic transducers; Voltage; Capacitive Micromachined Ultrasonic Trransducers; Large-signal Modeling; Pulse-echo Simulation;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0521
