Title :
Study on SAW characteristics of amorphous-TeO2/36°Y-X LiTaO3 structures
Author :
Gong, Xun ; Shang, Xiaoli ; Zhang, De
Author_Institution :
Dept. of Electron. Sci. & Eng., Nanjing Univ., Nanjing
Abstract :
Theoretical calculations have been performed for the temperature stability of the amorphous TeO2/36deg Y-X LiTaO3 structure. The phase velocity, electromechanical coupling coefficient and temperature coefficient of delay (TCD) have been calculated. It is found that it simultaneously has a very high K2 around 8%, a pure transverse surface wave mode and a zero TCD. The TCD can reach zero when the thickness of amorphous TeO2 film is much less than that of conventional SiO2 film, which means SAW devices on such substrates can be fabricated easily.
Keywords :
amorphous state; lithium compounds; surface acoustic wave devices; tellurium compounds; thermal stability; SAW characteristics; SAW device fabrication; TeO2-LiTaO3; amorphous structure; electromechanical coupling coefficient; phase velocity; temperature coefficient-of-delay; temperature stability; Amorphous materials; Delay; High K dielectric materials; High-K gate dielectrics; Stability; Substrates; Surface acoustic wave devices; Surface acoustic waves; Surface waves; Temperature; Amorphous TeO2 Film; SAW; TCD;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0244
