• DocumentCode
    3028483
  • Title

    Study on SAW characteristics of amorphous-TeO2/36°Y-X LiTaO3 structures

  • Author

    Gong, Xun ; Shang, Xiaoli ; Zhang, De

  • Author_Institution
    Dept. of Electron. Sci. & Eng., Nanjing Univ., Nanjing
  • fYear
    2008
  • fDate
    2-5 Nov. 2008
  • Firstpage
    1011
  • Lastpage
    1012
  • Abstract
    Theoretical calculations have been performed for the temperature stability of the amorphous TeO2/36deg Y-X LiTaO3 structure. The phase velocity, electromechanical coupling coefficient and temperature coefficient of delay (TCD) have been calculated. It is found that it simultaneously has a very high K2 around 8%, a pure transverse surface wave mode and a zero TCD. The TCD can reach zero when the thickness of amorphous TeO2 film is much less than that of conventional SiO2 film, which means SAW devices on such substrates can be fabricated easily.
  • Keywords
    amorphous state; lithium compounds; surface acoustic wave devices; tellurium compounds; thermal stability; SAW characteristics; SAW device fabrication; TeO2-LiTaO3; amorphous structure; electromechanical coupling coefficient; phase velocity; temperature coefficient-of-delay; temperature stability; Amorphous materials; Delay; High K dielectric materials; High-K gate dielectrics; Stability; Substrates; Surface acoustic wave devices; Surface acoustic waves; Surface waves; Temperature; Amorphous TeO2 Film; SAW; TCD;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2008. IUS 2008. IEEE
  • Conference_Location
    Beijing
  • Print_ISBN
    978-1-4244-2428-3
  • Electronic_ISBN
    978-1-4244-2480-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2008.0244
  • Filename
    4803709
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3028483