DocumentCode
3028602
Title
Rapid Cu(In,Ga)Se2 growth using “end point detection”
Author
Kessler, J. ; Schöldström, J. ; Stolt, L.
Author_Institution
Angstrom Solar Center, Uppsala Univ., Sweden
fYear
2000
fDate
2000
Firstpage
509
Lastpage
512
Abstract
Thin film Cu(InGa)Se2 (CIGS) is grown using a two stage co-evaporation process where all of the Cu is evaporated in the first stage. Near the end of the second stage, a Cu-rich to Cu-poor transition occurs, where the power delivered to the substrate heater in order to sustain a constant substrate temperature, changes as a result of a change in the radiative behavior of the CIGS film. The output power signal is shown to respond quickly to, and be characteristic of the film composition near the transition. Using this signal to monitor the deposition process results in excellent control of the final Cu content, even when the evaporation rates are poorly known and poorly controlled. High quality devices result, even at high evaporation rates. Solar cells with efficiencies close to 15 % have been produced from CIGS deposition times below 15 minutes and are only marginally better for deposition times of up to 45 minutes, and this at constant substrate temperatures of 500°C
Keywords
copper compounds; gallium compounds; indium compounds; semiconductor growth; semiconductor thin films; solar cells; ternary semiconductors; vacuum deposited coatings; vacuum deposition; Cu evaporation; Cu(InGa)Se2; Cu-rich to Cu-poor transition; constant substrate temperature; constant substrate temperatures; end point detection; evaporation rates; high evaporation rates; output power signal; radiative behavior change; rapid Cu(In,Ga)Se2 growth; solar cells; substrate heater power delivery; two stage co-evaporation process; Commercialization; Laboratories; Monitoring; Photovoltaic cells; Power generation; Signal processing; Substrates; Temperature; Throughput; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Specialists Conference, 2000. Conference Record of the Twenty-Eighth IEEE
Conference_Location
Anchorage, AK
ISSN
0160-8371
Print_ISBN
0-7803-5772-8
Type
conf
DOI
10.1109/PVSC.2000.915883
Filename
915883
Link To Document