The first surface micromachined pressure sensor for cardiovascular pressure measurements

Author

Kälvesten, E. ; Smith, L. ; Tenerz, L. ; Stemme, G.

Author_Institution

Dept. of Signals, Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden

fYear

1998

fDate

25-29 Jan 1998

Firstpage

574

Lastpage

579

Abstract

A surface micromachined pressure sensor for blood pressure measurements has been commercialized. Using a polysilicon surface micromachining process, a silicon chip with the dimensions of 100×150×1300 μm and a polysilicon diaphragm area of 103×103 μm has been fabricated. The piezoresistive pressure sensor has a typical pressure sensitivity of 2.0 μV/V mmHg which results in a blood pressure measurement accuracy better than 2 mmHg. This new pressure sensor is used clinically for blood pressure measurements in balloon angioplasty applications

Keywords

biomedical equipment; blood pressure measurement; cardiology; elemental semiconductors; microsensors; piezoelectric transducers; piezoresistive devices; pressure sensors; silicon; Si; Si chip; balloon angioplasty; blood pressure measurement; cardiovascular pressure measurements; clinical use; piezoresistive pressure sensor; polysilicon diaphragm; polysilicon surface micromachining; pressure sensitivity; surface micromachined pressure sensor; Arteries; Blood pressure; Cardiology; Catheters; Micromachining; Piezoresistance; Pressure measurement; Semiconductor device measurement; Sensor systems; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on

Conference_Location

Heidelberg

ISSN

1084-6999

Print_ISBN

0-7803-4412-X

Type

conf

DOI

10.1109/MEMSYS.1998.659821

Filename

659821