DocumentCode
3029594
Title
Characterisation of methane plasma treated carbon surfaces
Author
Deslandes, Alec ; Jasieniak, Marek ; Ionescu, Mihail ; Shapter, Joe G. ; Quinton, Jamie S.
Author_Institution
Smart Surface Struct. Group, Flinders Univ., Adelaide, SA
fYear
2008
fDate
25-29 Feb. 2008
Firstpage
24
Lastpage
27
Abstract
Time of Flight Secondary Ion Mass Spectrometry (ToF-SIMS) was used to investigate the chemical nature of methane plasma treated graphite surfaces. Principle Component Analysis (PCA) was applied to the SIMS data, revealing chemical changes to the surfaces, in particular the extent of hydrogenation. The hydrogen content of the HOPG surface is observed to increase with systematic increases in power of the plasma treatment. These results are supported by Elastic Recoil Detection Analysis (ERDA) measurements that show a similar increase in hydrogen content. Scanning Tunneling Microscopy (STM) measurements provide insight into the morphological changes to the surface caused by the treatment, via investigating plasma-created features that are observed to increase in coverage with the increases in plasma power.
Keywords
graphite; hydrogen; ion microprobe analysis; plasma materials processing; principal component analysis; scanning tunnelling microscopy; secondary ion mass spectra; surface chemistry; surface morphology; surface treatment; C; STM; carbon surfaces; elastic recoil detection analysis; graphite; hydrogenation; methane plasma treatment; principle component analysis; scanning tunneling microscopy; surface chemistry; surface morphology; time of flight secondary ion mass spectrometry; Chemical analysis; Hydrogen; Mass spectroscopy; Microscopy; Plasma chemistry; Plasma measurements; Principal component analysis; Surface morphology; Surface treatment; Tunneling; elastic recoil detection analysis; methane plasma; principle component analysis; secondary-ion mass spectrometry;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanoscience and Nanotechnology, 2008. ICONN 2008. International Conference on
Conference_Location
Melbourne, Vic.
Print_ISBN
978-1-4244-1503-8
Electronic_ISBN
978-1-4244-1504-5
Type
conf
DOI
10.1109/ICONN.2008.4639236
Filename
4639236
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