• DocumentCode
    3029710
  • Title

    Metrology for nanotechnology

  • Author

    Jämting, Å ; Miles, J.

  • Author_Institution
    Nanometrology Sect., Nat. Meas. Inst., Lindfield, NSW
  • fYear
    2008
  • fDate
    25-29 Feb. 2008
  • Firstpage
    56
  • Lastpage
    58
  • Abstract
    Nanotechnology is a global phenomenon that is already impacting significantly on Australia´s scientific, technological, economic and social development. As the nanotechnology industry continues to grow in Australia, it will require a suitable scientific, commercial and regulatory environment. A fundamental element of this environment is measurement. Reliable measurements of physical, chemical and biological quantities are necessary at all stages of the nanotechnology value chain to both truly understand and control the manufacturing process and ensure and demonstrate product quality. This article outlines the current status of the nanometrology program at the National Measurement Institute, Australia (NMIA) and presents some recent work, including the results from our participation in three international comparisons.
  • Keywords
    nanoparticles; nanotechnology; particle size; particle size measurement; thickness measurement; thin films; metrology; nanometrology; nanotechnology; particle size; Australia; Chemical elements; Chemical processes; Chemical products; Chemical technology; Environmental economics; Manufacturing industries; Metrology; Nanotechnology; Process control; film thickness; nanometrology; nanoparticles;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanoscience and Nanotechnology, 2008. ICONN 2008. International Conference on
  • Conference_Location
    Melbourne, Vic.
  • Print_ISBN
    978-1-4244-1503-8
  • Electronic_ISBN
    978-1-4244-1504-5
  • Type

    conf

  • DOI
    10.1109/ICONN.2008.4639244
  • Filename
    4639244