DocumentCode
3029710
Title
Metrology for nanotechnology
Author
Jämting, Å ; Miles, J.
Author_Institution
Nanometrology Sect., Nat. Meas. Inst., Lindfield, NSW
fYear
2008
fDate
25-29 Feb. 2008
Firstpage
56
Lastpage
58
Abstract
Nanotechnology is a global phenomenon that is already impacting significantly on Australia´s scientific, technological, economic and social development. As the nanotechnology industry continues to grow in Australia, it will require a suitable scientific, commercial and regulatory environment. A fundamental element of this environment is measurement. Reliable measurements of physical, chemical and biological quantities are necessary at all stages of the nanotechnology value chain to both truly understand and control the manufacturing process and ensure and demonstrate product quality. This article outlines the current status of the nanometrology program at the National Measurement Institute, Australia (NMIA) and presents some recent work, including the results from our participation in three international comparisons.
Keywords
nanoparticles; nanotechnology; particle size; particle size measurement; thickness measurement; thin films; metrology; nanometrology; nanotechnology; particle size; Australia; Chemical elements; Chemical processes; Chemical products; Chemical technology; Environmental economics; Manufacturing industries; Metrology; Nanotechnology; Process control; film thickness; nanometrology; nanoparticles;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanoscience and Nanotechnology, 2008. ICONN 2008. International Conference on
Conference_Location
Melbourne, Vic.
Print_ISBN
978-1-4244-1503-8
Electronic_ISBN
978-1-4244-1504-5
Type
conf
DOI
10.1109/ICONN.2008.4639244
Filename
4639244
Link To Document