Design of linear motor driving system for Nano-positioning stage

Author

Shuyuan Ma ; Hu Xie ; Wenbin Li ; Zhenning Sun

Author_Institution

Sch. of Mech. Eng., Beijing Inst. of Technol., Beijing, China

fYear

2013

fDate

20-22 Dec. 2013

Firstpage

3612

Lastpage

3616

Abstract

Considering the demands of driving the plane coil linear motor in Nano-positioning stage, a motor driver with small size and high-power was designed. To improve the accuracy of motor phase current detection, FIR filter and Cerebellar Model Articulation Controller (CMAC) neural network were adopted to reduce high-frequency noise and compensate the non-linear error of current sensor. The feasibility of the drive circuit and the validity of the filter and compensator were verified by experiments.

Keywords

FIR filters; cerebellar model arithmetic computers; error compensation; linear motors; linear systems; motor drives; nanopositioning; neurocontrollers; nonlinear control systems; CMAC neural network; FIR filter; cerebellar model articulation controller neural network; drive circuit; motor phase current detection; nanopositioning stage; plane coil linear motor driving system design; sensor nonlinear error compensation; Coils; Error compensation; Finite impulse response filters; Noise; Permanent magnet motors; Pulse width modulation; Synchronous motors; DRV8332; FIR; SISO-CMAC; error compensation; linear motor;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechatronic Sciences, Electric Engineering and Computer (MEC), Proceedings 2013 International Conference on

Conference_Location

Shengyang

Print_ISBN

978-1-4799-2564-3

Type

conf

DOI

10.1109/MEC.2013.6885627

Filename

6885627