Title :
Panel: subwavelength lithography: how will it affect your design flow?
Author :
Sharan, Aditi ; Lippincott, S. ; Kahng, Andrew
Author_Institution :
Numerical Technologies, Inc.
Keywords :
Costs; Electronic design automation and methodology; Geometry; Integrated circuit layout; Lithography; Manufacturing processes; Optical distortion; Process design; Shape; Silicon;
Conference_Titel :
Design Automation Conference, 1999. Proceedings. 36th
Conference_Location :
New Orleans, LA, USA
Print_ISBN :
1-58113-092-9
DOI :
10.1109/DAC.1999.782135
