MOVPE Technology for the Growth of III-V Semiconductor Structures

Metal-organic vapour phase epitaxy (MOVPE) is the most widely used technology for the growth of III-V compounds in the industry today, and has become the preferred choice for the mass fabrication of a wide range of devices. The I.E.S -U.P.M acquired a research-scale Aixtron MOVPE reactor in 2000 aiming the development of III-V multi-junction concentrator solar cells in a pilot production line. In this paper, a thorough review of the MOVPE technology is presented. Then, the specific configuration, its potentialities and the research being made today at the I.E.S -U.P.M is described. Finally, the achievements and future prospects are explained.