DocumentCode
30321
Title
Design and fabrication of cost-effective side-stem micromechanical disk resonator with large capacitive gap
Author
Phamvan, Huan ; Jongwon Seok ; Hae-Jin Choi
Author_Institution
Sch. of Mech. Eng., Chung-Ang Univ., Seoul, South Korea
Volume
50
Issue
10
fYear
2014
fDate
May 8 2014
Firstpage
764
Lastpage
766
Abstract
A high-performance micromechanical disk resonator is developed for use in mass detection biosensors. The resonator is designed to facilitate easy and cost-effective fabrication by anchoring the disk on the side stems and increasing the capacitive gap size up to 4.75 μm. The designed disk resonator operates in an elliptic contour-mode at a resonance frequency of 5.971 MHz with a quality factor of 4272 in ambient air condition and 17 221 in a 600 Torr vacuum environment.
Keywords
Q-factor; biosensors; micromechanical resonators; Q-factor; ambient air condition; capacitive gap; cost-effective fabrication; elliptic contour-mode; frequency 5.971 MHz; mass detection biosensors; quality factor; resonance frequency; side-stem micromechanical disk resonator; vacuum environment;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el.2014.0665
Filename
6824060
Link To Document