Title :
Heterogeneous III–V/Silicon-on-insulator photonic integrated circuits
Author :
Roelkens, G. ; Liu, L. ; Van Campenhout, J. ; Brouckaert, J. ; Van Thourhout, D. ; Baets, R.
Author_Institution :
Dept. of Inf. Technol. (INTEC), Ghent Univ., Ghent
Abstract :
III-Vsilicon-on-insulator photonics comprises the heterogeneous integration of a III-V layer on top of an SOI waveguide circuit. We elaborate on the fabrication technology and the realization of III-V/SOI photonic integrated circuits.
Keywords :
III-V semiconductors; adhesive bonding; integrated optics; silicon-on-insulator; SOI waveguide circuit; adhesive die-to-wafer bonding; heterogeneous Ill-V-silicon-on-insulator photonic integrated circuits; heterogeneous integration; silicon photonics; Bonding; III-V semiconductor materials; Optical devices; Optical pumping; Optical refraction; Optical surface waves; Optical waveguides; Photonic integrated circuits; Silicon on insulator technology; Waveguide lasers; Heterogeneous integration; Silicon Photonics;
Conference_Titel :
Photonics in Switching, 2008. PS 2008. International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-4326-0
Electronic_ISBN :
978-4-8855-2228-4
DOI :
10.1109/PS.2008.4804174
