Dimension-Scaling of Microcantilevers Resonators

Author

Narducci, M. ; Figueras, E. ; Gràcia, I. ; Fonseca, L. ; Santander, J. ; Cané, C.

Author_Institution

Inst. de Microelectron., Barcelona

fYear

2007

fDate

Jan. 31 2007-Feb. 2 2007

Firstpage

209

Lastpage

211

Abstract

In order to analyze the influence of the dimension-scaling on the sensitivity of a cantilever, a set of microcantilevers resonators were designed, fabricated and subsequently scaled. The cantilevers proposed are piezoelectrically actuated and the movement detection is done by four piezoresistors in a Wheatstone bridge configuration. As expected the experimental results show improvement of the resonance frequency and quality factor with the dimension-scaling. For example, an structure with dimensions in the range of 400x300mum² show the first mode of resonance frequency about 98 kHz and the quality factor around 680 and for this structure scaled with dimensions in the range of 200x150mum² the resonance frequency and the quality factor was 354 kHz and 950 respectively.

Keywords

Q-factor; cantilevers; micromechanical resonators; piezoelectric actuators; piezoresistive devices; resistors; Wheatstone bridge configuration; dimension-scaling; microcantilevers resonators; piezoelectric actuators; piezoresistors; quality factor; Bridge circuits; Conductivity; Etching; Fabrication; Micromechanical devices; Piezoresistive devices; Q factor; Resonance; Resonant frequency; Silicon; cantilever; piezoactuator; piezoresistor resonator;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices, 2007 Spanish Conference on

Conference_Location

Madrid

Print_ISBN

1-4244-0868-7

Type

conf

DOI

10.1109/SCED.2007.384028

Filename

4271206