• DocumentCode
    3033684
  • Title

    Photonic sensors based on integrated reflectivity, ellipsometry and spectrometry measurements in submicron size geometries

  • Author

    Casquel, R. ; Holgado, M. ; Molpeceres, C. ; Morales, M. ; Ocana, J.L.

  • Author_Institution
    Univ. Politecnica de Madrid, Madrid
  • fYear
    2007
  • fDate
    Jan. 31 2007-Feb. 2 2007
  • Firstpage
    336
  • Lastpage
    339
  • Abstract
    We have developed micro-nano structures as photonic sensors based on the observation of external reflectivity profiles. Spectra interference patterns as a function of the angle of incidence for both s and p polarizations directions as well as a phase shift between s and p polarisation are obtained. Also the reflectivity of the photonic structures is calculated and analyzed over a wide range of wavelengths of light as well. The sub-micro holes of the photonic structure have been evaluated with several refractive indices. As a result, the change in the effective refractive index involved by the optical liquids produces variations in the phase shift and the interference reflectivity patterns, making the system suitable for chemical, biochemical and pharmaceutical applications. The theoretical results of the integrated reflectivity, ellipsometry and spectrometry measurements ensure sensitive, accurate and reliable optical sensing detection.
  • Keywords
    ellipsometry; optical sensors; reflectivity; refractive index; angle of incidence; ellipsometry; external reflectivity profiles; integrated reflectivity; micro-nano structures; optical liquids; optical sensing detection; phase shift; photonic sensors; photonic structures; refractive indices; spectra interference patterns; spectrometry measurements; submicron size geometry; Ellipsometry; Geometry; Interference; Optical polarization; Optical refraction; Optical sensors; Optoelectronic and photonic sensors; Reflectivity; Size measurement; Spectroscopy; Sub-micro-holes; ellipsometry; refractive index sensor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices, 2007 Spanish Conference on
  • Conference_Location
    Madrid
  • Print_ISBN
    1-4244-0868-7
  • Type

    conf

  • DOI
    10.1109/SCED.2007.384062
  • Filename
    4271240