Three Dimensional Smart Pixel Integration Of A GaAs-based Detector Array Directly On Top Of Silicon Circuits

Author

Camperi-Ginestet, C. ; Buchanan, Brent ; Wan, Yiqin ; Jokerst, Nan Marie ; Brooke, Martin A. ; Allen, Mark G.

Author_Institution

Georgia Instutute of Technology

fYear

1994

fDate

6-13 Jul 1994

Keywords

Circuits; Detectors; Oscillators; Photodetectors; Polyimides; Sensor arrays; Silicon; Smart pixels; Sputter etching; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Integrated Optoelectronics, 1994., Proceedings of IEE/LEOS Summer Topical Meetings:

Print_ISBN

0-7803-1752-1

Type

DOI

10.1109/LEOSST.1994.700465

Filename

700465

Link To Document