Title :
Three Dimensional Smart Pixel Integration Of A GaAs-based Detector Array Directly On Top Of Silicon Circuits
Author :
Camperi-Ginestet, C. ; Buchanan, Brent ; Wan, Yiqin ; Jokerst, Nan Marie ; Brooke, Martin A. ; Allen, Mark G.
Author_Institution :
Georgia Instutute of Technology
Keywords :
Circuits; Detectors; Oscillators; Photodetectors; Polyimides; Sensor arrays; Silicon; Smart pixels; Sputter etching; Substrates;
Conference_Titel :
Integrated Optoelectronics, 1994., Proceedings of IEE/LEOS Summer Topical Meetings:
Print_ISBN :
0-7803-1752-1
DOI :
10.1109/LEOSST.1994.700465
