Electrical properties of co-fired high and low dielectric constant multilayer package materials

Author

Megherhi, Mohammed H. ; Dougherty, Joseph P. ; Dayton, Gordon O. ; Newnham, Robert E.

Author_Institution

Mater. Res. Lab., Pennsylvania State Univ., University Park, PA, USA

fYear

1990

fDate

6-8 Jun 1990

Firstpage

31

Lastpage

35

Abstract

The problems encountered in mixing high-dielectric-constant (high- K) lead-oxide-based capacitor layers in the same body as low-dielectric-permittivity (low-K) signal distribution layers were studied. Compatibility between the high-K capacitor material and low-fire (850-950°C) glass-Al₂O₃ substrates was investigated. Most high-K ceramic materials sinter at temperatures above 1000°C; firing at 900°C or lower can result in a porous structure with poor electrical properties

Keywords

capacitors; ceramics; packaging; permittivity; sintering; substrates; 850 to 950 degC; Al₂O₃; PbO; capacitor layers; ceramic materials; co-fired high dielectric constant materials; electrical properties; firing; glass-Al₂O₃ substrates; high-K capacitor material; low dielectric constant multilayer package materials; signal distribution layers; sintering; Capacitors; Ceramics; Dielectric materials; Dielectric substrates; High K dielectric materials; High-K gate dielectrics; Nonhomogeneous media; Packaging; Permittivity; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 1990., IEEE 7th International Symposium on

Conference_Location

Urbana-Champaign, IL

Print_ISBN

0-7803-0190-0

Type

conf

DOI

10.1109/ISAF.1990.200194

Filename

200194