Microstructure and ferroelectric properties of lead zirconate-titanate films produced by laser evaporation

Lead titanate-zirconate (PZT) films were produced by laser-induced vaporization from a PZT target with the use of a focused Q-switched Nd:YAG laser. Deposition was onto room-temperature platinum-covered silicon substrates. Although the films were initially amorphous, as indicated by X-rays, they crystallized when annealed. Energy dispersive X-ray results showed that the film and targets were similar in composition. Scanning electron microscope and optical dark field micrographs showed a structure which might be interpreted as a sintered assemblage of particulate. A pattern of platinum electrodes was sputter deposited onto each sample to form parallel plate capacitors for investigating dielectric and ferroelectric properties. For a 2.5-μm-thick film annealed at 700°C, the relative dielectric constant was approximately that of the bulk target. Hysteresis loops were obtained. The remanent polarization was 5.1 μC/cm² measured at a 160-kV/cm peak sinusoidal field