Title :
Basic thin film processing for perovskite materials
Author :
Adachi, Hideaki ; Kitabatake, Makoto ; Higashino, Hidetaka ; Setsune, Kentaro ; Wasa, Kiyotaka
Author_Institution :
Matsushita Electric Industrial Co Ltd., Osaka, Japan
Abstract :
Basic thin-film processing for ferroelectric perovskite oxides was investigated. Amorphous, polycrystal, and epitaxial thin films of Pb-based perovskite ferroelectrics were prepared by RF-magnetron sputtering and their properties are discussed. By utilizing the epitaxial PLZT films with excellent ferroelectric properties, several applications to optical electronic devices were examined, and an optical transmission system was constructed using high-speed PLZT optical switches. Trends in ferroelectric thin films are discussed
Keywords :
acousto-optical devices; amorphous state; electro-optical devices; epitaxial layers; ferroelectric switching; ferroelectric thin films; high-speed optical techniques; lead compounds; light transmission; optical films; optical switches; sputtered coatings; PLZT; PbLaZrO3TiO3; RF-magnetron sputtering; acoustooptic devices; amorphous films; applications; electrooptic devices; epitaxial thin films; ferroelectric perovskite oxides; ferroelectric properties; high-speed optical switches; optical electronic devices; optical films; optical transmission system; polycrystal films; thin-film processing; Amorphous materials; Ferroelectric films; Ferroelectric materials; High speed optical techniques; Optical devices; Optical films; Optical materials; Optical switches; Sputtering; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 1990., IEEE 7th International Symposium on
Conference_Location :
Urbana-Champaign, IL
Print_ISBN :
0-7803-0190-0
DOI :
10.1109/ISAF.1990.200240
