Basic thin film processing for perovskite materials

Author

Adachi, Hideaki ; Kitabatake, Makoto ; Higashino, Hidetaka ; Setsune, Kentaro ; Wasa, Kiyotaka

Author_Institution

Matsushita Electric Industrial Co Ltd., Osaka, Japan

fYear

1990

fDate

6-8 Jun 1990

Firstpage

273

Lastpage

278

Abstract

Basic thin-film processing for ferroelectric perovskite oxides was investigated. Amorphous, polycrystal, and epitaxial thin films of Pb-based perovskite ferroelectrics were prepared by RF-magnetron sputtering and their properties are discussed. By utilizing the epitaxial PLZT films with excellent ferroelectric properties, several applications to optical electronic devices were examined, and an optical transmission system was constructed using high-speed PLZT optical switches. Trends in ferroelectric thin films are discussed

Keywords

acousto-optical devices; amorphous state; electro-optical devices; epitaxial layers; ferroelectric switching; ferroelectric thin films; high-speed optical techniques; lead compounds; light transmission; optical films; optical switches; sputtered coatings; PLZT; PbLaZrO₃TiO₃; RF-magnetron sputtering; acoustooptic devices; amorphous films; applications; electrooptic devices; epitaxial thin films; ferroelectric perovskite oxides; ferroelectric properties; high-speed optical switches; optical electronic devices; optical films; optical transmission system; polycrystal films; thin-film processing; Amorphous materials; Ferroelectric films; Ferroelectric materials; High speed optical techniques; Optical devices; Optical films; Optical materials; Optical switches; Sputtering; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 1990., IEEE 7th International Symposium on

Conference_Location

Urbana-Champaign, IL

Print_ISBN

0-7803-0190-0

Type

conf

DOI

10.1109/ISAF.1990.200240

Filename

200240